1

Replication of Micro- and Nanostructures on Polymer Surfaces

Year:
2010
Language:
english
File:
PDF, 863 KB
english, 2010
5

Nanolithography with coherent extreme ultraviolet light

Year:
2006
Language:
english
File:
PDF, 4.02 MB
english, 2006
27

Space-invariant multiple-beam achromatic EUV interference lithography

Year:
2005
Language:
english
File:
PDF, 374 KB
english, 2005
31

High diffraction-efficiency molybdenum gratings for EUV lithography

Year:
2009
Language:
english
File:
PDF, 425 KB
english, 2009
47

Surface relief polymer structures grafted onto polymer films

Year:
2006
Language:
english
File:
PDF, 214 KB
english, 2006